Course | Dual Degree (B. Tech + Master of Science / Master of Technology) |
Semester | Electives |
Subject Code | PH468 |
Subject Title | MEMS and MOEMS |
Introduction: Fourier Optics, Holography, Optical thin films and periodical structures Bragg gratings, photonic crystals, Gaussian beam propagation, ultra fast lasers, Fundamentals of Nonlinear Optics, Quantum optics.
MEMS: Introduction & applications, Substrates: Quartz, Ceramics, and Polymers.
Smart materials and their properties. Thin films in the context of smart materials, nano, & micro- technologies. Lithography: Fundamentals. Materials such as photoresist used in lithography. Techniques such as using optical, electron beam,focused ion,x-ray beams. Etching and micro machining. Wet and dry etching, deep reactive ion etching. Packaging and bonding, micro-assembly. Reliability studies in packaging. MEMS devices for applications such as in aerospace, biomedical and process industries.
MOEMS: MOEM overview, MOEM scanners, MOEM technology and applications to telecom, CMOS compatible MOEMS, optics specific issues for MOEMS, micro-optics, automation and sensing, shape memory actuators, piezoelectric actuators, magnetic actuators, MOEMS related sensors, micro-optic components, testing and applications.
1. Nodium Maluf, “An introduction to micromechanical systems engineering”
2. Marc Madou, “Fundamentals of micro fabrication” CRC press (1997).
3. Ristic (Ed) “Sensor Technology & Devices”, Artech House Publications (1994).
4. MOEMS, SPIE Press, USA
Same as Text Books